材质

Material

K9等其他光学材料

K9 and other optical materials

规格

Specification

D20-450mm*10-200mm

设备硬件

Equipment hardware

LP16B、JP12A、LM08A、QJP25.4B及数台配套设备

LP16B, JP12A, LM08A, QJP25.4B and several supporting equipment

生产环境

Production environment

22±2°C，1500㎡万级洁净车间

22 ± 2°C, 1500 ㎡ million class clean workshop

检测设备

Testing equipment

HI-MARC450W型、HI-MARC150W型等多台数字激光干涉仪

HI-MARC450W, HI-MARC150W and other digital laser interferometer

技术指标范围

Range of technical indicators

PV=1~1/10λ、IRR优于1/5λ，RMS优于1/5λ， ∥优于0.001mm

PV=1~1/10λ, IRR is better than 1/5λ, RMS is better than 1/5λ, ∥ is better than 0.001mm

产品的具体技术参数都可根据用户的要求设计、加工。

The specific technical parameters of the product can be designed and processed according to the requirements of users.